中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者ITAYA KAZUHIKO; OKAJIMA MASASUE; ISHIKAWA MASAYUKI
发表日期1992-04-13
专利号JP1992111486A
著作权人TOSHIBA CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To prevent the dispersion of element dimension and improve uniformity of element properties and improve reliability by etching the layer, whose composition is different from that of the InGaAlP clad layer which forms a double hetero structure part, so as to form a ridge. CONSTITUTION:A ridge is formed by the etching of the GaAlAs layer 16, whose composition is different from that of an InGaAlP clad layer 15 which forms a double hetero structure. Accordingly, the thickness of the second conductivity type of first clad layer 15 is not determined by the depth of etching, but determined by the thickness of the clad layer formed first. Furthermore, the depth of etching in forming a ridge part is determined by the thickness of the second conductivity type of second clad layer 16, so the width W of the ridge part does not change by the difference of etching depth, and the width W is determined favorably in controllability. Hereby, the dispersion of the element dimension can be reduced excellently in reproducibility, and the laser device, where operation voltage is low and the highest oscillation temperature is high, can be produced excellently in yield rate.
公开日期1992-04-13
申请日期1990-08-31
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84686]  
专题半导体激光器专利数据库
作者单位TOSHIBA CORP
推荐引用方式
GB/T 7714
ITAYA KAZUHIKO,OKAJIMA MASASUE,ISHIKAWA MASAYUKI. Semiconductor laser device. JP1992111486A. 1992-04-13.

入库方式: OAI收割

来源:西安光学精密机械研究所

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