中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semicondutor light-emitting device

文献类型:专利

作者SASAI YOUICHI; OONAKA SEIJI
发表日期1985-07-06
专利号JP1985126885A
著作权人MATSUSHITA DENKI SANGYO KK
国家日本
文献子类发明申请
其他题名Semicondutor light-emitting device
英文摘要PURPOSE:To lengthen the life of a semiconductor laser, and to improve yield by forming an N type buffer layer between a P type buried layer and an N type clad layer. CONSTITUTION:An N type clad layer 2, an undoped active layer 3, a P type clad layer 4 and a P type contact layer are grown to the surface of a substrate 1 in an epitaxial manner in succession through a liquid phase epitaxial growth method. An silicon oxide insulating film is deposited on the P type contact layer, a pattern is formed to a striped shape through a photolithography method while using the silicon oxide insulating film as a mask, and mesa structure is formed by using the chemical etching of a Br methanol group. The substrate 1 to which mesa structure is shaped is fitted into a liquid phase growth boat, and an N type buffer layer 11, a P type buried layer 6 and an N type buried layer 7 are grown on the N type clad layer 2 in the epitaxial manner in succession again.
公开日期1985-07-06
申请日期1983-12-13
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84704]  
专题半导体激光器专利数据库
作者单位MATSUSHITA DENKI SANGYO KK
推荐引用方式
GB/T 7714
SASAI YOUICHI,OONAKA SEIJI. Semicondutor light-emitting device. JP1985126885A. 1985-07-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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