中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser and manufacture

文献类型:专利

作者SUGAO SHIGEO
发表日期1992-09-29
专利号JP1992273493A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser and manufacture
英文摘要PURPOSE:To improve light emission characteristics of crystal and to improve characteristics by reducing dislocation density of a semiconductor laser whose substrate is silicon single crystal. CONSTITUTION:This semiconductor laser is provided with double hetero structure which is constituted of a buffer layer 7, an active layer 8 and a clad layer 9 in a sheet-like space between a lower insulating layer 2 having a single crystalline window 3 which exposes a silicon single crystal surface on a silicon substrate 1 and an upper insulating layer 6. The double heterostructure is in contact with the silicon substrate 1 by the buffer layer 7 through the single crystalline window 3. Dislocation is generated from the single crystalline window 3 wherein the silicon substrate 1 and the buffer layer 7 are in contact with each other; generally, it extends upward according to crystal face orientation which forms a certain angle with the substrate surface and stops at an upper insulating layer. As a result, when the lateral width of the buffer layer 7 is adequately large, dislocation does not attain the active layer 8, thereby reducing dislocation density of the active layer 8. Double heterostructure of good light emission quality can be acquired in this way.
公开日期1992-09-29
申请日期1991-02-28
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84740]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
SUGAO SHIGEO. Semiconductor laser and manufacture. JP1992273493A. 1992-09-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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