Method of forming conductive paths on a substrate having depressions
文献类型：专利
| 作者 | SPRINGER JOHANN; JOERG WALTER; RICHTER HORST; JORG, WALTER |
| 发表日期 | 1996-06-25 |
| 专利号 | CA2166037A1 |
| 著作权人 | ALCATEL N.V. |
| 国家 | 加拿大 |
| 文献子类 | 发明申请 |
| 其他题名 | Method of forming conductive paths on a substrate having depressions |
| 英文摘要 | The invention concerns a method of forming a number ofelectric conductors at a very short distance from the end ofdepressions such as V-grooves on a substrate. In oneconfiguration example, a film of PTFE or of a similar materialis laminated over the entire surface of the substrate. Holesare etched in the film. The holes are metallized. Conductivepaths are formed, which are electrically connected to themetallized holes. The film in the area of the grooves isremoved by etching. In another configuration example, thegrooves are temporarily filled with a photoresist and theconductive paths and contact surfaces or bumps are formed inaccordance with a photolithographic method. |
| 公开日期 | 1996-06-25 |
| 申请日期 | 1995-12-22 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/84783]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ALCATEL N.V. |
| 推荐引用方式 GB/T 7714 | SPRINGER JOHANN,JOERG WALTER,RICHTER HORST,et al. Method of forming conductive paths on a substrate having depressions. CA2166037A1. 1996-06-25. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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