中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor light-emitting element

文献类型:专利

作者USHIJIMA ICHIROU; KOMIYAMA TAKESHI; TANAHASHI TOSHIYUKI
发表日期1982-11-06
专利号JP1982180192A
著作权人FUJITSU KK
国家日本
文献子类发明申请
其他题名Semiconductor light-emitting element
英文摘要PURPOSE:To obtain the buried type light-emitting element of low threshold value in lateral mode by a method wherein the forbidden bandwidth of an InGaAsP clad layer, to be buried in the V-groove of an InP substrate, is formed larger than that of an InGaAsP active layer. CONSTITUTION:A PInP 2 is grown on the (100) surface of an NInP 1, an SiO2 mask is attached in[01(-1)]direction using sputtering method, a V-groove is formed by performing an etching using Br2CH4OH solution. A clad layer is formed by removing the SiO2 mask, and when an NInGaAsP 3 with the forbidden bandwidth larger than that of the active layer, to be grown subsequently, has been grown in liquid-phase, a layer 3 is formed thickly in the V-groove and thinly on the plane (100) surface outside the V-groove. Subsequently, an InGaAsP active layer 4, a PInP layer 5, and a PInGaAsP connecting layer 6 are successively deposited, and then electrodes 7 and 8 are attached. According to this constitution, the semiconductor light-emitting element of stabilized lateral mode in low threshold value can be obtained with excellent reproduciblity.
公开日期1982-11-06
申请日期1981-04-30
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/84982]  
专题半导体激光器专利数据库
作者单位FUJITSU KK
推荐引用方式
GB/T 7714
USHIJIMA ICHIROU,KOMIYAMA TAKESHI,TANAHASHI TOSHIYUKI. Semiconductor light-emitting element. JP1982180192A. 1982-11-06.

入库方式: OAI收割

来源:西安光学精密机械研究所

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