Semiconductor device
文献类型:专利
作者 | KUSUKI SHIGEHIRO; SANO KAZUYA; BABA TAKAHISA |
发表日期 | 1990-02-22 |
专利号 | JP1990052484A |
著作权人 | OKI ELECTRIC IND CO LTD |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor device |
英文摘要 | PURPOSE:To obtain continuously constant photo detection efficiency by allowing a laser light for monitor emitted by a laser diode provided at a semiconductor substrate to incide a photo detector either directly or after being reflected by a light reflection member with the bottom surface itself of the semiconductor substrate as the photo detector. CONSTITUTION:A light reflection prevention film is coated on the surface of a photo detector 3 forming a bottom surface 2a of a recessed part 2 formed on the upper surface of an Si substrate 1 and a vertical part 4a where an electrode 4 is coated on a side surface 2b of the recessed part 2 plays a role as a light reflection member. Then, a laser diode (LD chip) 5 mounted on an LD drive electrode 6 at the edge part of the Si substrate 1, a laser light L1 irradiated from the LD chip 5 to the outside becomes the laser light for output, and a laser light L2 irradiated to a photo detector 3 side becomes the laser light for monitor. This laser light L2 for monitor incides the photo detector 3 either directly or being reflected by a vertical part 4a of an electrode 4 from an LD chip 5. Photo detection efficiency by the photo detector 4a is influenced only by the error at the mounting position of the LD chip 5 and scattering of value of signal for detecting the quantity of light is small, thus making constant the characteristics for detecting the quantity of light between products. |
公开日期 | 1990-02-22 |
申请日期 | 1988-08-16 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/85053] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | OKI ELECTRIC IND CO LTD |
推荐引用方式 GB/T 7714 | KUSUKI SHIGEHIRO,SANO KAZUYA,BABA TAKAHISA. Semiconductor device. JP1990052484A. 1990-02-22. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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