Semiconductor optical device
文献类型：专利
| 作者 | ABE TOMOKO |
| 发表日期 | 1986-12-11 |
| 专利号 | JP1986281577A |
| 著作权人 | MATSUSHITA ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor optical device |
| 英文摘要 | PURPOSE:To enable automatic high-precision axial alignment by mounting a semiconductor light-emitting element and a lens base onto the same substrate and preparing the end surface of the semiconductor light-emitting element and a groove fixing a lens through etching. CONSTITUTION:A photo-resist is applied onto a wafer to which the processes of epitaxial growth and the evaporation of an electrode are completed. When the wafer is etched by a HCl+CH3COOH+HPO3 group etching liquid, a vertical surface is obtained in the (011) direction (direction of the arrow A) and a V groove shape is acquired in the (011) direction (direction of the arrow B). Consequently, the end surface of a semiconductor laser 2 and a lens base 3 are obtained through the same etching, and a semiconductor laser is acquired through cleavage at the position of a dotted line. Accordingly, axial alignment requiring high precision is obtained automatically only by loading a lens on the lens base. |
| 公开日期 | 1986-12-11 |
| 申请日期 | 1985-06-07 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/85121]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MATSUSHITA ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | ABE TOMOKO. Semiconductor optical device. JP1986281577A. 1986-12-11. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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