Manufacture of optical integrated element
文献类型：专利
| 作者 | KANEKO TADAO; ADAKA SABURO; YAMASHITA SHIGEO |
| 发表日期 | 1988-02-08 |
| 专利号 | JP1988029583A |
| 著作权人 | HITACHI LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of optical integrated element |
| 英文摘要 | PURPOSE:To simplify a resist by double coating, far ultraviolet ray irradiation and heat treatment processes by a method wherein the resist is hardened by ultraviolet ray irradiation and heat treatment and after covering the part not coated with resist 3 mum thick, the resist on fine patterns is removed. CONSTITUTION:Fine patterns are previously formed of resist 1 mum thick on a specimen 2 with surface step difference around 6 mum thick to harden the resist by ultraviolet ray irradiation and heat treatment. Next, the step difference 6 mum thick is coated with resist 9 3 mum thick to be covered therewith. After covering a source and drain, the resist thereon is removed. Finally, AuGe (900 Angstrom ), Ni (200 Angstrom ) and Au (1200 Angstrom ) are vacuum evaporated and then source and drain electrodes are formed. |
| 公开日期 | 1988-02-08 |
| 申请日期 | 1986-07-23 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/85189]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | HITACHI LTD |
| 推荐引用方式 GB/T 7714 | KANEKO TADAO,ADAKA SABURO,YAMASHITA SHIGEO. Manufacture of optical integrated element. JP1988029583A. 1988-02-08. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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