On-chip integration of passive and active optical components enabled by hydrogenation
文献类型：专利
| 作者 | KIESEL, PETER; KNEISSL, MICHAEL A.; CHUA, CHRISTOPHER L.; JOHNSON, NOBLE M. |
| 发表日期 | 2007-07-05 |
| 专利号 | US20070153851A1 |
| 著作权人 | PALO ALTO RESEARCH CENTER INCORPORATED |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | On-chip integration of passive and active optical components enabled by hydrogenation |
| 英文摘要 | A method and structure for integrating many optical devices on a single wafer is described. The method fabricates passive interconnect devices using hydrogenation techniques. Lateral optical confinement is achieved by hydrogenating regions laterally adjacent to the waveguide core. Vertical optical confinement is adjusted by careful control of the hydrogen content of the waveguide core itself. |
| 公开日期 | 2007-07-05 |
| 申请日期 | 2005-12-15 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/85293]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | PALO ALTO RESEARCH CENTER INCORPORATED |
| 推荐引用方式 GB/T 7714 | KIESEL, PETER,KNEISSL, MICHAEL A.,CHUA, CHRISTOPHER L.,et al. On-chip integration of passive and active optical components enabled by hydrogenation. US20070153851A1. 2007-07-05. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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