Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter
文献类型：专利
| 作者 | TAYEBATI PARVIZ; AZIMI MASUD; WANG PEIDONG; VAKHSHOORI DARYOOSH |
| 发表日期 | 1999-09-10 |
| 专利号 | WO1999034484A3 |
| 著作权人 | CORETEK, INC. |
| 国家 | 世界知识产权组织 |
| 文献子类 | 发明申请 |
| 其他题名 | Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter |
| 英文摘要 | A method of fabricating microelectromechanically tunable vertical-cavity surface-emitting laser (4) and microelectromechanically tunable Fabry-Perot filter (2) with precise lateral and vertical dimensional control is disclosed. Strained reflective dielectric film stack (6) are applied to multiple quantum-well structure to electronically band-gap-engineer the quantum wells. Strain in the reflective dielectric layers is used to create a curvature in one of the reflective dielectric film stacks to form a confocal-cavity (8) between a planar reflective dielectric film stack (10) and a curved reflective film stack (12) in the laser or filter, which are also provided with suspended membrane structure (37) that supports a cavity-tuning dielectric film stack, while being anchored at the perimeter by a meatal support posts (38). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a sacrificial material of polyamide or aluminum. Furtheing reflective dielectric film stack in a controlled electrostatic field. |
| 公开日期 | 1999-09-10 |
| 申请日期 | 1998-12-28 |
| 状态 | 未确认 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/85576]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CORETEK, INC. |
| 推荐引用方式 GB/T 7714 | TAYEBATI PARVIZ,AZIMI MASUD,WANG PEIDONG,et al. Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter. WO1999034484A3. 1999-09-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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