Nano-VCSEL device and fabrication thereof using nano-colonnades
文献类型:专利
作者 | WANG, SHIH-YUAN; ISLAM, M. SAIF |
发表日期 | 2006-05-11 |
专利号 | US20060098705A1 |
著作权人 | SAMSUNG ELECTRONICS CO., LTD. |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Nano-VCSEL device and fabrication thereof using nano-colonnades |
英文摘要 | A nano-colonnade VCSEL device and a method of fabrication utilize a nanowire column grown nearly vertically from a (111) horizontal surface of a first layer to another horizontal surface of a second layer to connect the layers. The VCSEL device includes a first layer having the (111) horizontal surface; a second layer; and an insulator support between the first layer and the second layer that separates the first layer from the second layer. A portion of the second layer overhangs the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer. The VCSEL device further includes a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface, and distributed Bragg mirrors adjacent to opposite end of the nanowire column. |
公开日期 | 2006-05-11 |
申请日期 | 2005-03-21 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/85707] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | SAMSUNG ELECTRONICS CO., LTD. |
推荐引用方式 GB/T 7714 | WANG, SHIH-YUAN,ISLAM, M. SAIF. Nano-VCSEL device and fabrication thereof using nano-colonnades. US20060098705A1. 2006-05-11. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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