-
文献类型：专利
| 作者 | OKAMOTO KENJI |
| 发表日期 | 1993-07-28 |
| 专利号 | JP1993050159B2 |
| 著作权人 | SUMITOMO ELECTRIC INDUSTRIES |
| 国家 | 日本 |
| 文献子类 | 授权发明 |
| 其他题名 | - |
| 英文摘要 | PURPOSE:To miniaturize and lighten the titled gyro, to reduce power consumption and to improve reliability by forming the ring laser gyro consisting of a semiconductor laser with a ring type resonator, a waveguide and a Y type coupling element on a semiconductor substrate as one chip. CONSTITUTION:An InP clad layer 32, a non-doped InGaAsP active layer 33 and an InP clad layer 34 are grown on an InP substrate 31 in an epitaxial manner in succession. The active layer 33 is brought to thickness of 0.1-0.3mum in order to lower a threshold at that time. An oxide 35 patterned as an etching mask is formed to the substrate, and a ring-shape resonator section, a waveguide suction and a Y coupling section are etched through a normal photolithography technique. A crystal is grown while using the oxide 35 as a mask. |
| 公开日期 | 1993-07-28 |
| 申请日期 | 1984-01-12 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/86522]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SUMITOMO ELECTRIC INDUSTRIES |
| 推荐引用方式 GB/T 7714 | OKAMOTO KENJI. -. JP1993050159B2. 1993-07-28. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。