中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser array

文献类型:专利

作者YAMADA, HIROHITO
发表日期1999-03-23
专利号US5887012
著作权人NEC CORPORATION
国家美国
文献子类授权发明
其他题名Semiconductor laser array
英文摘要A semiconductor laser array according to the invention is so constructed that plural LDs are driven by the same modulating signal, and series connection of the plural LDs becomes possible. Accordingly, efficiency of modulation of the aforementioned semiconductor laser array is largely improved. After a n-InP clad layer 6, an active layer 7 and a p-InP layer 8 are successively grown on a semi-insulating substrate 5, the n-InP clad layer 6 is etched and a stripe shaped mesa is formed. Then, a p-InP current blocking layer 9 and a n-InP current blocking layer 10 are grown on the etched portion. After fabricating a p+-InP cap layer 11 thereon, the surface of the n-InP clad layer 6 is exposed by selective etching. Moreover, a channel 12 for isolating the adjacent LDs, reaching the semi-insulating layer 5, is formed by penetrating the n-InP clad layer 6. Each of the LDs is provided with a p-side electrode 13 and a n-side electrode 14 thereon, and a p-side electrode 13 of any LD is connected to the n-side electrode of an adjacent LD by a bonding wire 3.
公开日期1999-03-23
申请日期1996-12-09
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/86821]  
专题半导体激光器专利数据库
作者单位NEC CORPORATION
推荐引用方式
GB/T 7714
YAMADA, HIROHITO. Semiconductor laser array. US5887012. 1999-03-23.

入库方式: OAI收割

来源:西安光学精密机械研究所

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