Method and arrangement for arbitrary angle mirrors in substrates for use in hybrid optical systems
文献类型：专利
| 作者 | GOOSSEN, KEITH WAYNE; WALKER, JAMES ALBERT |
| 发表日期 | 1997-12-10 |
| 专利号 | EP0651266A3 |
| 著作权人 | AT&T CORP. |
| 国家 | 欧洲专利局 |
| 文献子类 | 发明申请 |
| 其他题名 | Method and arrangement for arbitrary angle mirrors in substrates for use in hybrid optical systems |
| 英文摘要 | A method for forming, and an arrangement for using arbitrary angle mirrors in substrates is disclosed. An erodible material, such as a photoresist, is applied to a substrate at a site and is exposed to radiation at that site which has a linear variation in energy at the surface of the erodible material. Due to this variation in exposure energy, a taper results in the erodible material after development. The tapered region is then etched in a manner which etches both the erodible layer and the underlying substrate. The taper in the erodible layer provides a varying attenuation during the etching process such that the taper of the erodible layer, or a multiple of it, is transferred to the substrate. In a first embodiment, a tapered reflective surface is formed in a substrate, which surface engages an optical signal and deflects it to an optical device or another surface. In a second embodiment, two tapered reflective surfaces are formed in a substrate and oriented to deflect incident light to a modulation device. In a third embodiment, an arrangement for modulating a light signal is formed by two tapered reflective surfaces. The surfaces are oriented to form a vee groove in a substrate and are coated with an active semiconductor device. |
| 公开日期 | 1997-12-10 |
| 申请日期 | 1994-10-19 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/86874]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AT&T CORP. |
| 推荐引用方式 GB/T 7714 | GOOSSEN, KEITH WAYNE,WALKER, JAMES ALBERT. Method and arrangement for arbitrary angle mirrors in substrates for use in hybrid optical systems. EP0651266A3. 1997-12-10. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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