Optical semiconductor equipment
文献类型:专利
作者 | NAKAHARA, KOUJI; TSUCHIYA, TOMONOBU; TAIKE, AKIRA; SHINODA, KAZUNORI |
发表日期 | 2004-05-27 |
专利号 | US20040099859A1 |
著作权人 | LUMENTUM JAPAN, INC. |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Optical semiconductor equipment |
英文摘要 | The prior art distributed feedback laser having an InGaAlAs active layer involves a problem that its laser characteristics are deteriorated at high temperature due to the high device resistance. According to the present invention, a ridge type laser is fabricated by: forming an InGaAlAs-MQW layer 104 on a n-type InP substrate 101; growing a p-type InGaAlAs-GRIN-SCH layer 105, a p-type InAlAs electron stopping layer 106 and a p-type grating layer 107 in this order on the InGaAlAs-MQW layer 104; forming a grating; and regrowing a p-type InP cladding layer 108 and a p-type InGaAs contact layer in this order. The concave depth of the grating is smaller than the thickness of the p-type grating layer 107. |
公开日期 | 2004-05-27 |
申请日期 | 2003-06-27 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/86906] |
专题 | 半导体激光器专利数据库 |
作者单位 | LUMENTUM JAPAN, INC. |
推荐引用方式 GB/T 7714 | NAKAHARA, KOUJI,TSUCHIYA, TOMONOBU,TAIKE, AKIRA,et al. Optical semiconductor equipment. US20040099859A1. 2004-05-27. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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