Waveguide type lens device
文献类型：专利
| 作者 | UNO TOMOAKI; SERIZAWA HIROMOTO; HORI YOSHIKAZU; MATSUI YASUSHI; ODANI JIYUN |
| 发表日期 | 1988-04-27 |
| 专利号 | JP1988096606A |
| 著作权人 | MATSUSHITA ELECTRIC IND CO LTD |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Waveguide type lens device |
| 英文摘要 | PURPOSE:To easily manufacture a waveguide type lens by a two-beam interference exposing method by using an optical waveguide which decreases in effective refractive index gradually and a diffraction grating on the waveguide which has a constant period. CONSTITUTION:A buffer layer 23 of SiO2 is formed on a substrate 24 and etched with fluoric acid, etc., into a specific tapered shape. A waveguide layer 22 is formed thereupon and then the optical waveguide layer 22 decreases gradually in effective refractive index in the propagation direction of light. A silicon nitride film is deposited further thereupon and the diffraction grating 21 with a 0.6mum constant period is formed by the two-beam interference exposing method and a mask exposing method. When waveguide 25 with 0.8mum is made incident thereupon, it is converged on a convergence position 28. Thus, the waveguide lens is easily manufactured by the conventional two-beam interference exposing method. |
| 公开日期 | 1988-04-27 |
| 申请日期 | 1986-10-14 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/87143]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | MATSUSHITA ELECTRIC IND CO LTD |
| 推荐引用方式 GB/T 7714 | UNO TOMOAKI,SERIZAWA HIROMOTO,HORI YOSHIKAZU,et al. Waveguide type lens device. JP1988096606A. 1988-04-27. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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