中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レ-ザ

文献类型:专利

作者伊藤 達也; 末松 安晴
发表日期1994-10-12
专利号JP1994080864B2
著作权人FUJIKURA KK
国家日本
文献子类授权发明
其他题名半導体レ-ザ
英文摘要PURPOSE:To eliminate the need for establishing difficult process conditions and obtain a semiconductor laser that is favorably reproducible by forming a current bottleneck layer like a stripe in the direction of optical axis and also in the position corresponding to an external waveguide layer at both sides of an active region on a substrate. CONSTITUTION:Recessed grooves 1b and 1c are formed by photolithography on an upper plane of a p-InP substrate In such a case, widths of the recessed grooves 1b and 1c are formed so that they are equal to that of an external waveguide layer 4 or slightly larger than that of the layer 4 and there is a somewhat difference between both widths of the grooves and the layer. Further, their positions are so correspondent to a position of the waveguide layer 4 in a distributed reflection region that the grooves are formed at both sides of an active region where a part of the active region used as a current path is excluded. Then N-InGaAsP current bottleneck layers 15 perform an epitaxial growth on the substrate In such a case, a width between 1b and 1c is so narrow that it is filled with its growth in a short time and its upper plane becomes flat. This approach makes it possible to form simply the current bottleneck layers that are favorably reproducible without establishing difficult process conditions.
公开日期1994-10-12
申请日期1987-01-06
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/87307]  
专题半导体激光器专利数据库
作者单位FUJIKURA KK
推荐引用方式
GB/T 7714
伊藤 達也,末松 安晴. 半導体レ-ザ. JP1994080864B2. 1994-10-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

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