中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor light-emitting and manufacture thereof

文献类型:专利

作者HOSHINA JUNICHI; OGURA MOTOTSUGU; ONAKA SEIJI
发表日期1990-12-10
专利号JP1990298090A
著作权人MATSUSHITA ELECTRIC IND CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor light-emitting and manufacture thereof
英文摘要PURPOSE:To decrease heat generation in a clad layer for improving a characteristic by forming a structure having a P-type conductive region on one side and an n-type conductive region on the other side putting a projected stripe between in a double heterojunction structure consisting of a semiconductor substrate and a first clad layer, an active layer, a second clad layer of projected striped structure. CONSTITUTION:Epitaxial growth of an undoped Al GaInP clad layer 2, a GaInP active layer 3 and an undoped Al GaInP clad layer 4 is performed in order on an S. I. GaAs substrate. Next, the Al GaInP layer 4 is selectively etched, having an SiO2 9 as a mask to leave a layer 4 in the shape of a projected stripe. Further, undoped GaAs layers 5, 6 are made to epitaxially grow excepting a region containing the SiO2 9 mask by selective growth having SiO2 9 as a mask. Next, doping is performed in order to form P, n regions on the undoped GaAs layers 5 and 6 respectively. In this way, the P-type region 7 and n-type region 8 are formed. Lastly, a P-type electrode 9 is formed on a P-GaAs layer 5 while an n-type electrode 10 is formed on an n-GaAs layer 6 for being finished.
公开日期1990-12-10
申请日期1989-05-12
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/87479]  
专题半导体激光器专利数据库
作者单位MATSUSHITA ELECTRIC IND CO LTD
推荐引用方式
GB/T 7714
HOSHINA JUNICHI,OGURA MOTOTSUGU,ONAKA SEIJI. Semiconductor light-emitting and manufacture thereof. JP1990298090A. 1990-12-10.

入库方式: OAI收割

来源:西安光学精密机械研究所

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