中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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文献类型:专利

作者MORIMOTO TAIJI; HAYASHI HIROSHI; YAMAMOTO SABURO; YANO MORICHIKA
发表日期1993-09-14
专利号JP1993064478B2
著作权人SHARP KK
国家日本
文献子类授权发明
其他题名-
英文摘要PURPOSE:To contrive the improvement in manufacturing yield of the titled element of hetero junction type and in reliability of characteristics by a method wherein a groove is formed in a substrate on which multilayer crystals are laminated. CONSTITUTION:After the grown surface of a crystal layer 8 is flattened by filling the groove 7 formed in the crystal growing substrate 1 with the crystal layer 8 doped with a small amount of Mg (0.2 at % or less), a clad layer 9 doped with a large amount of Mg (0.3 at % or more) is grown. Thereby, a clad layer 9 suitably controlled in carrier concentration and layer thickness is deposited on the substrate 1, and a flat active layer 4 is laminated thereon, resulting in the formation of a multilayer crystal structure for laser oscillation. Since the groove is filled with a crystal layer, the growing speed does not decrease, and the coefficient of As diffusion in the growing solution is kept constant; accordingly, the groove is filled rapidly. As a result, the growing surface of the crystal layer is almost flattened in a relatively short time. Next, a perfect hetero junction which prevents the leakage of carriers from the active layer can be obtained by depositing a flat active layer on the clad layer 9 having a sufficient carrier concentration.
公开日期1993-09-14
申请日期1984-04-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/87537]  
专题半导体激光器专利数据库
作者单位SHARP KK
推荐引用方式
GB/T 7714
MORIMOTO TAIJI,HAYASHI HIROSHI,YAMAMOTO SABURO,et al. -. JP1993064478B2. 1993-09-14.

入库方式: OAI收割

来源:西安光学精密机械研究所

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