中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者SAKIYAMA HAJIME; TANAKA HARUO; MUSHIGAMI MASAHITO
发表日期1990-08-01
专利号JP1990194584A
著作权人ROHM CO LTD
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To reduce threshold current and improve current efficiency by forming an N-type or an undoped layer between a first upper-part clad layer constituting a first growth layer and a light-absorbing layer and by forming a P-type dopant implantation part at this stripe groove corresponding part. CONSTITUTION:A lower-part clad layer 21, an active layer 22, a first upper-part clad layer 23, and an N-type or an undoped layer 23a. a light-absorbing layer 24, and an evaporation prevention layer 25 are laminated in sequence and a first growth layer 2 is formed on a semiconductor substrate. An evaporation- prevention layer 25 other than an area for forming a stripe groove 3 is covered with a photo resist 6 and an evaporation-prevention layer 25 and the light- absorbing layer 24 are etched for leaving the light-absorbing layer 24 slightly, thus forming the stripe groove 3 of any width. Then, ion is allowed to hit against and is implanted into the surface of the N-type layer (or undoped layer) 23a. thus forming a P-type dopant ion implantation part 6 at a part corresponding to the stripe groove 3 of the N-type layer (or undoped layer) 23a.
公开日期1990-08-01
申请日期1989-01-23
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/87893]  
专题半导体激光器专利数据库
作者单位ROHM CO LTD
推荐引用方式
GB/T 7714
SAKIYAMA HAJIME,TANAKA HARUO,MUSHIGAMI MASAHITO. Semiconductor laser. JP1990194584A. 1990-08-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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