中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor light emitting device

文献类型:专利

作者OTSUKA KENICHI; ABE YUJI; OISHI TOSHIYUKI; SUGIMOTO HIROSHI; MATSUI TERUHITO
发表日期1989-08-29
专利号JP1989215087A
著作权人MITSUBISHI ELECTRIC CORP
国家日本
文献子类发明申请
其他题名Semiconductor light emitting device
英文摘要PURPOSE:To reduce a laser oscillation threshold current with a modulation portion kept unified, by making an active region in the shape of a narrow stripe and the same time, by forming at least an optical guide layer by the liquid growth method and placing it inside a wave guide portion and on both sides of the active region. CONSTITUTION:In the first crystal growth, an InP clad layer 2, an InGaAsP active layer 3 and an InP layer 4 are formed in this order on an InP substrate Nextly, the InP layer 4 is etched selectively and the active layer 3 is also etched selectively to form a narrow stripe active region and to expose the surface of the InP clad layer 2. In the second crystal growth, an InGaAsP guide layer 5, an InP clad layer 6 and an InGaAsP contact layer 7 are formed in this order. At this time, at least the guide layer 5 is formed by the liquid phase growth method. Since the growth time is controlled properly, the guide layer is not deposited on the narrow stripe-shaped active region.
公开日期1989-08-29
申请日期1988-02-24
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/87913]  
专题半导体激光器专利数据库
作者单位MITSUBISHI ELECTRIC CORP
推荐引用方式
GB/T 7714
OTSUKA KENICHI,ABE YUJI,OISHI TOSHIYUKI,et al. Semiconductor light emitting device. JP1989215087A. 1989-08-29.

入库方式: OAI收割

来源:西安光学精密机械研究所

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