中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体発光素子の製造方法

文献类型:专利

作者細井 洋治; 小林 正男; 的場 昭大; 鹿島 保昌
发表日期1999-11-05
专利号JP2999520B2
著作权人沖電気工業株式会社
国家日本
文献子类授权发明
其他题名半導体発光素子の製造方法
英文摘要PURPOSE:To enable a radiation beam to be oscillated in a basic mode and to make a light emitting diode high in emission efficiency and low in threshold current by a method wherein a semiconductor layer which is made to serve as a current blocking layer is made to grow on a board-like region where a protrusion is not provided, the semiconductor layer to serve as a first current blocking layer is subjected to a melt etching process to be thin as prescribed into a first current blocking layer, and a second current blocking layer is provided onto the first current blocking layer. CONSTITUTION:An N-InP layer is formed on the region of a P-InP substrate where a mesa stripe 6 is not provided. The N-InP layer is melt-etched using an SiO2. thin film 5 as a mask to form a first current blocking layer 7a. In succession, a P-InP layer is grown on the first current blocking layer 7a to form a second current blocking layer 8. The second current blocking layer 8 is formed so as to come into contact with a new plane 4b of a second clad layer 4 which is formed by removing a part 4a of a second clad layer 4 in contact with an N-InP layer 7.
公开日期2000-01-17
申请日期1990-07-13
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/88196]  
专题半导体激光器专利数据库
作者单位沖電気工業株式会社
推荐引用方式
GB/T 7714
細井 洋治,小林 正男,的場 昭大,等. 半導体発光素子の製造方法. JP2999520B2. 1999-11-05.

入库方式: OAI收割

来源:西安光学精密机械研究所

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