Traveling wave type optical amplifier
文献类型：专利
| 作者 | SUHARA MOTOI; TANIOKA AKIRA |
| 发表日期 | 1992-06-25 |
| 专利号 | JP1992179179A |
| 著作权人 | 株式会社東芝 |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Traveling wave type optical amplifier |
| 英文摘要 | PURPOSE:To enable a traveling wave type optical amplifier to be surely possessed of stable gain characteristics wide in band independent of the direction of polarization of incident light by a method wherein the width of the top of a tapered part provided to the lengthwise top of a strip-like optical waveguide region is set coincident with the thickness of the optical waveguide region. CONSTITUTION:A P-InP clad layer 11, an InGaAsP active layer 12, an N-InP clad layer 13, and an N-InGaAsP cap layer 14 are successively grown on a P-type InP substrate 10. Then, a waveguide region 15 is formed through a photolithography technique. At this point, the waveguide region 15 is formed into such a shape that its tapered tops 16 are narrower than its center, and the tapered top 16 is composed of a tapered part 17 and a funnel part 18, and the width Wa of the top of the funnel part 18 in contact with a window region 19 is set equal to the thickness da of the InGaAsP active layer 12 correspondent to the waveguide region 15. After the waveguide region 15 is formed, a P-InP block layer 20, an N-InP block layer 21, and a P-InGaAsP ohmic layer 22 are laminated so as to bury the waveguide region 15. Furthermore, a P-side electrode 23 and an N-side electrode 24 are formed to finish a wafer. Then, the laminate concerned is cleaved for the formation of the window region 19, and a dielectric anti-reflection film 25 is deposited on a cleavage plane. |
| 公开日期 | 1992-06-25 |
| 申请日期 | 1990-11-08 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/88222]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | 株式会社東芝 |
| 推荐引用方式 GB/T 7714 | SUHARA MOTOI,TANIOKA AKIRA. Traveling wave type optical amplifier. JP1992179179A. 1992-06-25. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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