Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device
文献类型：专利
| 作者 | KUDO, KOJI |
| 发表日期 | 2001-07-19 |
| 专利号 | US20010008539A1 |
| 著作权人 | NEC CORPORATION |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device |
| 英文摘要 | In a method of manufacturing a semiconductor optical waveguide array in an ultra-high integration, the device yield per wafer is considerably increased and uniform and improved characteristics are obtained. In this method, there is manufactured a semiconductor optical waveguide array including a plurality of optical waveguides in an array structure in stripe-shaped growth regions enclosed by dielectric thin films on a substrate. The waveguides are fabricated through a selective crystal growth process and include a semiconductor multilayer structure including a quantum well layer or a semiconductor multilayer structure including a bulk layer. Namely, there is formed a plurality of stripe-shaped growth regions elongated parallel to each other, the regions being enclosed with a dielectric thin film. In each growth region, a semiconductor multilayer structure is selectively grown by metallo-organic vapor phase epitaxy (MOVPE). In the selective growth, the growth regions are parallel to each other with an interval therebetween, the interval being less than a diffusion length of a source material in a reactive tube during the crystal growth. Assuming that the dielectric thin film arranged between the respective growth regions has a width Wa and a first outer-most dielectric thin film and a second outer-most dielectric thin film arranged respectively outside of outer-most ones of the growth regions respectively have widths Wm1 and Wm2, there is satisfied a relationship of Wm1>Wa and Wm2>Wa. |
| 公开日期 | 2001-07-19 |
| 申请日期 | 2001-01-26 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/88508]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NEC CORPORATION |
| 推荐引用方式 GB/T 7714 | KUDO, KOJI. Method of manufacturing a semiconductor optical waveguide array and an array-structured semiconductor optical device. US20010008539A1. 2001-07-19. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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