中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical integrated circuit

文献类型:专利

作者TSUNEKAWA YOSHIFUMI
发表日期1990-11-21
专利号JP1990284490A
著作权人SEIKO EPSON CORP
国家日本
文献子类发明申请
其他题名Optical integrated circuit
英文摘要PURPOSE:To increase coupling rate and improve the reliability of an optical integrated circuit by monolithically forming an optical device LD, an optical waveguide, and a Fresnel lens. CONSTITUTION:In an LD the following are laminated in order on an N-type GaAs substrate 201; an N-type GaAs buffer layer 202, an N-type Al GaAs clad layer 203, an AlGaAs active layer 204 a P-type Al GaAs clad layer 205, and a P-type GaAs contact layer 206. A rib type waveguide formed by performing etching up to the midway of the layer 205 is arranged, and a II-VI Compound semiconductor layer is buried in the side surface of the waveguide. The structure of the optical waveguide and a Fresnel lens is as fellows; after the layer 206 is laminated, the layers are eliminated up to the midway of the layer 203, three II-VI compound semiconductor layers are laminated, and the uppermost ZnS clad layer 212 is patterned so as to match with each kind of structure. Output light from the LD101 propagates in the optical waveguide 103, enters the Fresnel lens 104, and turns to parallel rays, and then are output.
公开日期1990-11-21
申请日期1989-04-26
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/88612]  
专题半导体激光器专利数据库
作者单位SEIKO EPSON CORP
推荐引用方式
GB/T 7714
TSUNEKAWA YOSHIFUMI. Optical integrated circuit. JP1990284490A. 1990-11-21.

入库方式: OAI收割

来源:西安光学精密机械研究所

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