Optical integrated circuit
文献类型:专利
作者 | TSUNEKAWA YOSHIFUMI |
发表日期 | 1990-11-21 |
专利号 | JP1990284490A |
著作权人 | SEIKO EPSON CORP |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Optical integrated circuit |
英文摘要 | PURPOSE:To increase coupling rate and improve the reliability of an optical integrated circuit by monolithically forming an optical device LD, an optical waveguide, and a Fresnel lens. CONSTITUTION:In an LD the following are laminated in order on an N-type GaAs substrate 201; an N-type GaAs buffer layer 202, an N-type Al GaAs clad layer 203, an AlGaAs active layer 204 a P-type Al GaAs clad layer 205, and a P-type GaAs contact layer 206. A rib type waveguide formed by performing etching up to the midway of the layer 205 is arranged, and a II-VI Compound semiconductor layer is buried in the side surface of the waveguide. The structure of the optical waveguide and a Fresnel lens is as fellows; after the layer 206 is laminated, the layers are eliminated up to the midway of the layer 203, three II-VI compound semiconductor layers are laminated, and the uppermost ZnS clad layer 212 is patterned so as to match with each kind of structure. Output light from the LD101 propagates in the optical waveguide 103, enters the Fresnel lens 104, and turns to parallel rays, and then are output. |
公开日期 | 1990-11-21 |
申请日期 | 1989-04-26 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/88612] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | SEIKO EPSON CORP |
推荐引用方式 GB/T 7714 | TSUNEKAWA YOSHIFUMI. Optical integrated circuit. JP1990284490A. 1990-11-21. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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