Optical integrated circuit
文献类型:专利
作者 | KOIZUMI YOSHIHIRO |
发表日期 | 1991-12-24 |
专利号 | JP1991292777A |
著作权人 | NEC CORP |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Optical integrated circuit |
英文摘要 | PURPOSE:To realize a two-way light communication optical integrated circuit at a low cost by a method wherein a distributed feedback type semiconductor laser composed of a first conductivity type optical waveguide layer, an active layer, and a clad layer is formed on a primary diffraction grating, a photodetector composed of a first conductivity type layer, a light absorbing layer, and a second conductivity type layer is provided onto a secondary diffraction grating, and they are electrically isolated from each other. CONSTITUTION:An n-type optical waveguide layer 13 (InGaAsP), an active layer 14 (InGaAsP), a P-type clad layer 15 (InP), and a P-type contact layer 15 (InGaAs) are successively and selectively grown on a primary diffraction grating 11 to constitute a distributed feedback semiconductor laser. Then, an N-type clad layer 19 (InP), a non-doped light absorbing layer 20 (InGaAs), and a P-type contact layer (InGaAs) are successively, selectively grown on a secondary diffraction grating 12 to form a photodetector. Furthermore, a region between the distributed feedback type semiconductor laser and the photodetector is etched so deep as to reach an N-type semiconductor substrate 10, and an iron doped InP 23, an iron doped InGaAsP layer 24 and an iron doped lnP layer 23 are selectively grown on the etched part concerned through a vapor growth method. |
公开日期 | 1991-12-24 |
申请日期 | 1990-04-10 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/88798] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NEC CORP |
推荐引用方式 GB/T 7714 | KOIZUMI YOSHIHIRO. Optical integrated circuit. JP1991292777A. 1991-12-24. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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