中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor light-emitting element and its manufacture

文献类型:专利

作者KASAHARA KENICHI; YANASE TOMOO
发表日期1988-09-22
专利号JP1988228694A
著作权人NEC CORP
国家日本
文献子类发明申请
其他题名Semiconductor light-emitting element and its manufacture
英文摘要PURPOSE:To make a crystal laminated body having a structure of enabling high-speed modulation, generating oscillation and luminescence with high-efficiency and high- productivity by laminating a first conductive type and second epitaxial growth layer, a third epitaxial growth layer which is an active layer for luminescence, a second conductive type fourth epitaxial growth layer by turns on a groove in the depth passing through an interface under the first epitaxial growth layer. CONSTITUTION:A first epitaxial growth layer consisting of a high-resistance current constriction layer 12 and an n-type electrode constriction layer is formed on an n-type semiconductor substrate 1 Next, a silicon oxide mask 21 having a strip-shaped window is formed on the surface of the n-type electrode constriction layer 12 of the first epitaxial growth layer while forming a V-shaped groove 22 with bromomethanol. Further, a crystal lamination body consisting of an n-type clad layer 13 which is a second epitaxial growth layer, an active layer 14 which is a third epitaxial growth layer, a p-type clad layer 15 which is a fourth epitaxial growth layer and a contact layer 16 which is a fifth epitaxial growth layer is made to epitaxial-grow selectively on an etching groove 22 having the V-shaped base.
公开日期1988-09-22
申请日期1987-03-17
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/88826]  
专题半导体激光器专利数据库
作者单位NEC CORP
推荐引用方式
GB/T 7714
KASAHARA KENICHI,YANASE TOMOO. Semiconductor light-emitting element and its manufacture. JP1988228694A. 1988-09-22.

入库方式: OAI收割

来源:西安光学精密机械研究所

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