中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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文献类型:专利

作者ASATA SUSUMU
发表日期1993-02-16
专利号JP1993011673B2
著作权人NIPPON ELECTRIC CO
国家日本
文献子类授权发明
其他题名-
英文摘要PURPOSE:To improve the efficiency of a laser device by forming a striped current conduction region at the central section of the device and shaping current constriction regions in both side regions along a stripe. CONSTITUTION:A first clad layer 11 is grown onto a substrate 10, and an active layer 12 and a second clad layer 13 are grown. The focussed ion beams 23 of gallium ions, etc., are driven into borderlines between a striped region 21 and a external regions 22 of the region 21, and parallel trenches 24 symmetric to the center line of an element are cut. Focussed ion beams 23 are moved to positions where trench ends at outermost ends to the center line of the device are irradiated, novel trenches 31 are continued to be cut in parallel with the trenches by focussed ion beams 23 while the re-adhesion layers 32 of a sputtering substance are formed, the trenches 24 are fill, and lastly high resistance layer regions 42 and fine width trenches 43 are shaped on both side surfaces along the stripe of a striped region 41 in the active layer 12, and electrodes 44, 45 are formed. Leakage currents from an active layer region are reduced in the semiconductor laser device shaped, thus allowing laser oscillation having high efficiency.
公开日期1993-02-16
申请日期1986-11-17
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/88832]  
专题半导体激光器专利数据库
作者单位NIPPON ELECTRIC CO
推荐引用方式
GB/T 7714
ASATA SUSUMU. -. JP1993011673B2. 1993-02-16.

入库方式: OAI收割

来源:西安光学精密机械研究所

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