Integrated type optical branching/coupling element and its manufacture
文献类型：专利
| 作者 | UCHIDA MAMORU |
| 发表日期 | 1992-11-27 |
| 专利号 | JP1992342208A |
| 著作权人 | CANON INC |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Integrated type optical branching/coupling element and its manufacture |
| 英文摘要 | PURPOSE:To provide the new device structure formed by integrating an optical waveguide and an optical branching/coupling element, and also, to obtain excellent reliability and reproducibility by patterning and etching simultaneously the optical waveguide and the optical branching/coupling element part. CONSTITUTION:By pre-etching a coupler 105 area in advance, the whole wafer can be smoothed at the time of applying a resist, therefore, a single photomask alignment is sufficient and also, rib type waveguides 102-104 and a wave front split type coupler 105 can be manufacture by a single fine working. Thus, the improvement of yield, the realization of a large area and the improvement of device accuracy can be expected. |
| 公开日期 | 1992-11-27 |
| 申请日期 | 1991-05-17 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/88884]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON INC |
| 推荐引用方式 GB/T 7714 | UCHIDA MAMORU. Integrated type optical branching/coupling element and its manufacture. JP1992342208A. 1992-11-27. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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