中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser element

文献类型:专利

作者KINOSHITA HIDEAKI
发表日期1986-09-30
专利号JP1986220393A
著作权人TOSHIBA CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser element
英文摘要PURPOSE:To ensure stable horizontal transverse mode controllability, and to lower a threshold by the sufficient throttling of injection currents by forming an optical guide layer with a rib striped type projecting section and shaping a diffusion region having the same conduction type as the optical guide layer into a reverse bias type second clad layer formed onto the optical guide layer. CONSTITUTION:An n-type AlxGa1-xAs first clad layer 2, an un-doped AlyGa1-yAs active layer 3 and a p-type AlzGa1-zAs optical guide layer 11 are grown on an n-type GaAs substrate 1 in succession. A striped mask pattern 12 coating only a section in a current injection region on the optical guide layer 11 is shaped. The exposed section of the optical guide layer is etched while using a mask pattern as a protective film to form a groove, and an n-type AlxGa1-xAs second clad layer 9 and a p-type GaAs contact layer 7 are grown on the optical guide layer 11 shaped in rib structure. A mask pattern is formed, Zn is diffused selectively until it reaches a rib section in the optical guide layer 11, and a p-type diffusion region 10 is shaped, thus completing laser element structure.
公开日期1986-09-30
申请日期1985-03-26
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/89165]  
专题半导体激光器专利数据库
作者单位TOSHIBA CORP
推荐引用方式
GB/T 7714
KINOSHITA HIDEAKI. Semiconductor laser element. JP1986220393A. 1986-09-30.

入库方式: OAI收割

来源:西安光学精密机械研究所

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