Structure of dfb type laser
文献类型:专利
作者 | SHIMA KATSUTO |
发表日期 | 1986-09-18 |
专利号 | JP1986210688A |
著作权人 | FUJITSU LTD |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Structure of dfb type laser |
英文摘要 | PURPOSE:To obtain oscillated light, whose characteristics are extremely uniform, by forming a lightguide layer, which is divided into a corrugated region and both end parts, making the corrugated part thicker than that of both end parts, and controlling not only an axial direction mode but also a lateral direction mode. CONSTITUTION:A laser light emitting region comprises a double heterostructure, in which a first clad layer 1, a lightguide layer 2, an active layer 3 and a second clad layer 4 are sequentially laminated. The interface between the lightguide layer and the first clad layer comprises a stripe type corrugated region 7 and flat regions on both sides of the stripe type. The corrugated region 7 has a width (d) and an amplitude of 1/2. A thickness h2 of the flat region on both sides other than the corrugated region is thinner than the lightguide layer 2. In forming the lightguide layer having such a shape, at first resist is applied on an n-InP substrate 1 and intereference-fringe exposure of the corrugation forming region is performed with laser light. After development of the resist, etching is carried out, and the corrugated shape can be obtained. |
公开日期 | 1986-09-18 |
申请日期 | 1985-03-14 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/89263] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FUJITSU LTD |
推荐引用方式 GB/T 7714 | SHIMA KATSUTO. Structure of dfb type laser. JP1986210688A. 1986-09-18. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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