中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
半導体レーザ装置

文献类型:专利

作者中塚 慎一; 河野 敏弘; 斉藤 勝利; 梶村 俊
发表日期1996-09-19
专利号JP2564343B2
著作权人株式会社日立製作所
国家日本
文献子类授权发明
其他题名半導体レーザ装置
英文摘要PURPOSE:To make the light spot size at a laser edge side region larger than that at a central region to increase the spot size at the laser edge side region by allowing an optical waveguide to use mainly the gain difference between inside and outside of a stripe at the laser center, and to use mainly the refraction factor difference between the inside and outside of the stripe near a laser edge side. CONSTITUTION:Recesses 2 of a GaAs substrate and an n-GaAs layer 3 are formed on a p-GaAs substrate 1 then a groove 4 is formed which becomes an optical waveguide. The groove 4 is formed by a width of about 5-7mum in an area between the recess 2 of the substrate 1, and in other areas, it is formed by about 3-5mum. The depths of the groove 4 and the recess 2 are about 2mum and 4mum, respectively. Then an n-Ga0.5Al0.5As clad layer 5, an undoped Ga0.86Al0.14As active layer 6, an n-Ga0.5Al0.5As clad layer 7 and an n-GaAs cap layer 8 are caused to successively grow. Then, an AuGaNi/Cr/Au electrode 9 and a Cr/Au electrode 10 are formed and a reflection surface is formed by carrying out cleavage at a section 2-2.
公开日期1996-12-18
申请日期1987-12-23
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/89405]  
专题半导体激光器专利数据库
作者单位株式会社日立製作所
推荐引用方式
GB/T 7714
中塚 慎一,河野 敏弘,斉藤 勝利,等. 半導体レーザ装置. JP2564343B2. 1996-09-19.

入库方式: OAI收割

来源:西安光学精密机械研究所

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