Manufacture of semiconductor optical input and output circuit
文献类型：专利
| 作者 | OKU SATORU; IKEDA MASAHIRO; KATO HARUSHIGE; SHIBATA YASUO |
| 发表日期 | 1992-03-18 |
| 专利号 | JP1992085503A |
| 著作权人 | NIPPON TELEGR & TELEPH CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of semiconductor optical input and output circuit |
| 英文摘要 | PURPOSE:To accurately guide part of propagated light in an optical waveguide out at a desired light guide-out rate by controlling the size along the optical axis of the core layer at the opening part of a mask and controlling the depth size of a groove. CONSTITUTION:A specific crystal surface which has positional relation of 54.7 deg. to the optical axis line 2a, i.e. a crystal face 10 where a (111) face 10 is exposed is used as an optical reflecting surface by chemical etching so as to guide the propagated light in the semiconductor optical waveguide at the specific rate to, for example, a substrate side where the optical waveguide is formed. The light intensity distribution of the propagated light in the optical waveguide is determined unequivocally by determining the refractive indexes and film thicknesses of a core layer 2 and clad layers 3 and 4 which constitute the optical waveguide. Therefore, the depth size D of the groove needs to be determined according to the light intensity distribution and further the width L of the opening part 14 of a mask pattern 13 needs to be determined according to a relational equation D=0.707L so as to obtain a desired value as the rate of the light which can be guided out of the crystal face 10 as the optical reflecting surface to all the propagated light, so that the crystal face 10 can be formed to desired depth. |
| 公开日期 | 1992-03-18 |
| 申请日期 | 1990-07-30 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/89446]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NIPPON TELEGR & TELEPH CORP |
| 推荐引用方式 GB/T 7714 | OKU SATORU,IKEDA MASAHIRO,KATO HARUSHIGE,et al. Manufacture of semiconductor optical input and output circuit. JP1992085503A. 1992-03-18. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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