中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者UEHARA SHINGO; OE KUNISHIGE; OKAYASU MASANOBU; TAKESHITA TATSUYA; KOGURE OSAMU
发表日期1991-05-28
专利号JP1991125487A
著作权人NIPPON TELEGR & TELEPH CORP
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To provide a small high-power laser capable of stable oscillation at a wavelength of about 0.98mum by forming a quantum well structure of an active well layer of InxGa1-xAs and a barrier layer of GaAs or AlyGa1-yAs, where the proportion of indium and the well layer thickness are determined properly. CONSTITUTION:A semiconductor laser has a quantum well structure in which a well layer is sandwiched between barrier layers. The well layer 5 is formed of In0.2Ga0.8As of a 110 thickness. The wavelength of oscillation is about 980nm. More generally, the well layer 5 is formed of 30 to 200 Angstrom thick InxGa1-xAs, where 0.15<=X<=0.3. In this case, the wavelength of oscillation is about 980+ or -3nm. A contact layer 8 and a clad layer 7 are processed to form a ridge having a thickness of about 3mum. An SiO2 film formed by sputtering is patterned into 3mum-wide stripes, and it is used as a mask to etch the contact layer 8 and clad layer 7 by RIE using BCl3. After the ridge is formed, SiO2 is deposited over the surface, and the SiO2 on the ridge is etched away. Then, a p-electrode 10 of CrAu and an n-electrode 11 of AuGeNi are formed.
公开日期1991-05-28
申请日期1989-10-09
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/89451]  
专题半导体激光器专利数据库
作者单位NIPPON TELEGR & TELEPH CORP
推荐引用方式
GB/T 7714
UEHARA SHINGO,OE KUNISHIGE,OKAYASU MASANOBU,et al. Semiconductor laser. JP1991125487A. 1991-05-28.

入库方式: OAI收割

来源:西安光学精密机械研究所

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