Semiconductor laser and manufacture thereof
文献类型:专利
作者 | IMANAKA KOUICHI; MATOBA AKIHIRO; HORIKAWA HIDEAKI; OGAWA HIROSHI |
发表日期 | 1986-01-21 |
专利号 | JP1986013683A |
著作权人 | OKI DENKI KOGYO KK |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Semiconductor laser and manufacture thereof |
英文摘要 | PURPOSE:To maintain oscillation at a single wavelength even when an external temperature changes by forming two semiconductor laser sections shaped by dividing one resonator into two into the same chip. CONSTITUTION:A V groove 2 is formed onto the surface of an N-InP substrate 1 in the direction. An N-InP first clad layer 3, a GaInAsP active layer 4, a P-InP second clad layer 5 and a P GaInP ohmic-contact layer 6 are grown on the substrate 1 in a multilayer manner in succession. Consequently, the layer 3 grows only on the surface of the substrate 1 on the outside of the groove 2, the layer 4 grows in the groove 2 and on the whole surface on the layer 3, and the layer 5 and the layer 6 also grow on the whole surface. The wafer is mesa- etched until mesa etching reaches to the layer 3 from the layer 6 so that the stripe direction is directed in the direction, thus obtaining stripe structure 7. Current stopping regions 8 are grown on the layers 3 on both sides of structure 7. According to the constitution, laser sections 11a, 11b uniformly expand or shrink by the change of an external temperature, thus maintaining oscillation at a single wavelength. |
公开日期 | 1986-01-21 |
申请日期 | 1984-06-28 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/89659] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | OKI DENKI KOGYO KK |
推荐引用方式 GB/T 7714 | IMANAKA KOUICHI,MATOBA AKIHIRO,HORIKAWA HIDEAKI,et al. Semiconductor laser and manufacture thereof. JP1986013683A. 1986-01-21. |
入库方式: OAI收割
来源:西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。