中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser device

文献类型:专利

作者YANO MORICHIKA; YAMAMOTO SABUROU; KURATA YUKIO; MATSUI KANEKI; HAYAKAWA TOSHIROU; TAKIGUCHI HARUHISA
发表日期1981-09-12
专利号JP1981116688A
著作权人SHARP KK
国家日本
文献子类发明申请
其他题名Semiconductor laser device
英文摘要PURPOSE:To facilitate manufacture of a semiconductor laser device and improve its reliability by surrounding the mesa structure with a photoresist. CONSTITUTION:On an N type semiconductor substrate 1, an N type layer 2, a P type layer 3 to be an active region, a P type layer 4 and a P type layer 5 are successively grown. Then, mesa etching is applied to the layers 2-5 so as to reach the substrate Then, the mesa structure portion is coated with a photoresist 6 so that the surface of the layer 5 is exposed from the resist 6. Then, an electrode 8 is formed over the layer 5 and the resist 6, and another electrode 9 on the substrate Thereby, the resist 6, which has a lower refractive index than the layer 3 as an active region, can trap the light from the layer 3. By said structure, the number of the liquid phase epitaxial growth needed for manufacture of a laser device can be reduced to only one, so that the manufacture is facilitated as well as the reliability is improved.
公开日期1981-09-12
申请日期1980-02-19
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/89842]  
专题半导体激光器专利数据库
作者单位SHARP KK
推荐引用方式
GB/T 7714
YANO MORICHIKA,YAMAMOTO SABUROU,KURATA YUKIO,et al. Semiconductor laser device. JP1981116688A. 1981-09-12.

入库方式: OAI收割

来源:西安光学精密机械研究所

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