中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Semiconductor laser

文献类型:专利

作者SAKUMA ISAMU; NISHIDA KATSUHIKO
发表日期1980-11-01
专利号JP1980140285A
著作权人NIPPON ELECTRIC CO
国家日本
文献子类发明申请
其他题名Semiconductor laser
英文摘要PURPOSE:To obtain a fundamental lateral mode oscillation of a semiconductor laser without altering the thickness of an active layer by forming a groove at the center on the surface of a semiconductor substrate when forming the active layer on the substrate, and growing the active layer through a light guide and a carrier enclosure layer on the entire surface including the groove. CONSTITUTION:A photoresist film having an opening is formed on the surface of an n-type InP substrate 8, etched to form a fine V-shaped groove 15 at the center on the surface of the substrate 8. Then, the resist film is removed, and n-type In0.88Ga0.12As0.26P0.74 light guide and carrier enclosure layer 9, p-type In0.77Ga0.23 Ga0.51P0.49 active layer 10, p-type InP photon and carrier enclosure layer 11 are sequentially laminated on the entire surface thereof, and liquid phase is epitaxially grown to form a rectifying junction 16 in the boundary between the layer 9 and 10. Then, an SiO2 film 12 is coated on the surface of the layer 11, an opening is perforated corresponding to the groove 15, a p-type electrode 14 is coated on the surface of the exposed layer 11, and an n-type electrode 13 is coated on the back surface of the substrate 8. Thus, since it is not necessary to alter the thickness of the layer 10, it improves its reproducibility.
公开日期1980-11-01
申请日期1979-03-22
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/89858]  
专题半导体激光器专利数据库
作者单位NIPPON ELECTRIC CO
推荐引用方式
GB/T 7714
SAKUMA ISAMU,NISHIDA KATSUHIKO. Semiconductor laser. JP1980140285A. 1980-11-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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