Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel
文献类型:专利
作者 | CHIROVSKY, LEO M. F.; FELD, STEWART; KISKER, DAVID; NAONE, RYAN LIKEKE |
发表日期 | 2004-01-23 |
专利号 | AU2003256382A1 |
著作权人 | OPTICAL COMMUNICATION PRODUCTS, INC. |
国家 | 澳大利亚 |
文献子类 | 发明申请 |
其他题名 | Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel |
英文摘要 | A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser. |
公开日期 | 2004-01-23 |
申请日期 | 2003-07-03 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/91115] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | OPTICAL COMMUNICATION PRODUCTS, INC. |
推荐引用方式 GB/T 7714 | CHIROVSKY, LEO M. F.,FELD, STEWART,KISKER, DAVID,et al. Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength vcsel. AU2003256382A1. 2004-01-23. |
入库方式: OAI收割
来源:西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。