Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof
文献类型：专利
| 作者 | KWON, O KYUN; PARK, MI RAN; HAN, WON SEOK; KIM, JONG HEE; SONG, HYUN WOO |
| 发表日期 | 2009-06-18 |
| 专利号 | US20090155942A1 |
| 著作权人 | KWON O KYUN |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof |
| 英文摘要 | Provided is a method of fabricating a vertical cavity surface emitting laser among semiconductor optical devices, comprising: bonding a dielectric mirror layer to an epi-structure having a mirror layer and an active layer; bonding these on a new substrate using a metal bonded method; removing the existing substrate; and fabricating a vertical cavity surface emitting laser on the new substrate. The method of fabricating the vertical cavity surface emitting laser is performed by moving and attaching a vertical cavity surface emitting laser to a new substrate using an external metallic bonding method, without electrically and optically affecting upper and lower mirrors and an active layer that constitutes the vertical cavity surface emitting laser. While using the existing method of fabricating the vertical cavity surface emitting laser, the VCSEL is fabricated by moving to a new substrate having good thermal characteristics so that good heat emission characteristics are accomplished, thus facilitating manufacture of the vertical cavity surface emitting laser having high reliability and good characteristics. |
| 公开日期 | 2009-06-18 |
| 申请日期 | 2009-01-19 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/91326]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | KWON O KYUN |
| 推荐引用方式 GB/T 7714 | KWON, O KYUN,PARK, MI RAN,HAN, WON SEOK,et al. Hybrid metal bonded vertical cavity surface emitting laser and fabricating method thereof. US20090155942A1. 2009-06-18. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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