Method of fabrication of a micro-optics device with curved surface defects
文献类型：专利
| 作者 | ARMIN W KNOLL; URS T DUERIG; FEI DING; THILO HERMANN STOEFERLE; RAINER F MAHRT |
| 发表日期 | 2013-10-02 |
| 专利号 | GB2500670A |
| 著作权人 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 国家 | 英国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method of fabrication of a micro-optics device with curved surface defects |
| 英文摘要 | A method of making a micro-optics device, such as a vertical cavity surface emitting laser (VCSEL), comprising providing a layer 300 of material, patterning said layer 300 to form a curved defect 20 which may be Gaussian or parabolic in one or more planes parallel to the vertical axis, and providing at least another layer or material in contact with the curved surface 20. The additional layers may form a distributed Bragg reflector (DBR). The patterning uses nano-lithographic techniques based on scanning probe microscopy (SPM), using a nano-scale tipped probe 50 to desorb the surface molecules, which may be non-covalently or hydrogenically bonded, or unzipping (depolymerising) polymer chains. The method serves to provide lateral photon confinement, increase the quality (Q) factor of the microcavity and reduce the mode volume. |
| 公开日期 | 2013-10-02 |
| 申请日期 | 2012-03-29 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/91486]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| 推荐引用方式 GB/T 7714 | ARMIN W KNOLL,URS T DUERIG,FEI DING,et al. Method of fabrication of a micro-optics device with curved surface defects. GB2500670A. 2013-10-02. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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