中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Vertical cavity surface emitting laser for high power single mode operation and method of fabrication

文献类型:专利

作者JIANG, WENBIN; LEBBY, MICHAEL S.; RAMDANI, JAMAL
发表日期2000-02-01
专利号US6021146
著作权人FINISAR CORPORATION
国家美国
文献子类授权发明
其他题名Vertical cavity surface emitting laser for high power single mode operation and method of fabrication
英文摘要A VCSEL for high power single mode operation and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The VCSEL structure includes an enhanced conductivity region formed within a central portion of the second stack of distributed Bragg reflectors and within the laser emission path. The enhanced conductivity region is defined by either zinc diffusion or beryllium implants. An electrical contact is coupled to a surface of the second stack of distributed Bragg reflectors and an electrical contact is positioned a surface of the substrate element.
公开日期2000-02-01
申请日期1997-09-15
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/91969]  
专题半导体激光器专利数据库
作者单位FINISAR CORPORATION
推荐引用方式
GB/T 7714
JIANG, WENBIN,LEBBY, MICHAEL S.,RAMDANI, JAMAL. Vertical cavity surface emitting laser for high power single mode operation and method of fabrication. US6021146. 2000-02-01.

入库方式: OAI收割

来源:西安光学精密机械研究所

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