Vertical cavity surface emitting laser for high power single mode operation and method of fabrication
文献类型:专利
作者 | JIANG, WENBIN; LEBBY, MICHAEL S.; RAMDANI, JAMAL |
发表日期 | 2000-02-01 |
专利号 | US6021146 |
著作权人 | FINISAR CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting laser for high power single mode operation and method of fabrication |
英文摘要 | A VCSEL for high power single mode operation and method of fabrication including a substrate element, a first stack of distributed Bragg reflectors disposed on a surface of the substrate element, an active region lattice matched to a surface of the first stack of distributed Bragg reflectors, and a second stack of distributed Bragg reflectors lattice matched to a surface of the active region. The VCSEL structure includes an enhanced conductivity region formed within a central portion of the second stack of distributed Bragg reflectors and within the laser emission path. The enhanced conductivity region is defined by either zinc diffusion or beryllium implants. An electrical contact is coupled to a surface of the second stack of distributed Bragg reflectors and an electrical contact is positioned a surface of the substrate element. |
公开日期 | 2000-02-01 |
申请日期 | 1997-09-15 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/91969] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | FINISAR CORPORATION |
推荐引用方式 GB/T 7714 | JIANG, WENBIN,LEBBY, MICHAEL S.,RAMDANI, JAMAL. Vertical cavity surface emitting laser for high power single mode operation and method of fabrication. US6021146. 2000-02-01. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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