中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus

文献类型:专利

作者HARA,KEI; KAMINISHI,MORIMASA
发表日期2017-08-16
专利号EP2131458B1
著作权人RICOH COMPANY, LTD.
国家欧洲专利局
文献子类授权发明
其他题名Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
英文摘要A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed thereon, an active layer formed on the lower reflecting mirror, a selective oxidization layer including a current confined structure, and an upper reflecting mirror. A mesa structure is formed in at least the active layer, selective oxidization layer, and the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between an upper electrode and a lower electrode. The semiconductor substrate is inclined with respect to (100) plane, and the active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate.
公开日期2017-08-16
申请日期2009-05-29
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/93086]  
专题半导体激光器专利数据库
作者单位RICOH COMPANY, LTD.
推荐引用方式
GB/T 7714
HARA,KEI,KAMINISHI,MORIMASA. Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus. EP2131458B1. 2017-08-16.

入库方式: OAI收割

来源:西安光学精密机械研究所

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