Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus
文献类型:专利
作者 | HARA,KEI; KAMINISHI,MORIMASA |
发表日期 | 2017-08-16 |
专利号 | EP2131458B1 |
著作权人 | RICOH COMPANY, LTD. |
国家 | 欧洲专利局 |
文献子类 | 授权发明 |
其他题名 | Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus |
英文摘要 | A vertical cavity surface emitting laser (VCSEL) includes a semiconductor substrate, a lower reflecting mirror formed thereon, an active layer formed on the lower reflecting mirror, a selective oxidization layer including a current confined structure, and an upper reflecting mirror. A mesa structure is formed in at least the active layer, selective oxidization layer, and the upper reflecting mirror. The VCSEL emits laser light perpendicularly to the plane of the semiconductor substrate when an electric current flows between an upper electrode and a lower electrode. The semiconductor substrate is inclined with respect to (100) plane, and the active layer includes a quantum well layer having a compressive strain with respect to the substrate, and a spacer layer. The spacer layer has either a compressive strain or a tensile strain with respect to the semiconductor substrate. |
公开日期 | 2017-08-16 |
申请日期 | 2009-05-29 |
状态 | 授权 |
源URL | [http://ir.opt.ac.cn/handle/181661/93086] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | RICOH COMPANY, LTD. |
推荐引用方式 GB/T 7714 | HARA,KEI,KAMINISHI,MORIMASA. Vertical cavity surface emitting laser (VCSEL), VCSEL array device, optical scanning apparatus, and image forming apparatus. EP2131458B1. 2017-08-16. |
入库方式: OAI收割
来源:西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。