A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion
文献类型：期刊论文
| 作者 | Du, Zhangming1,2 ; Zhou, Chao2; Zhang, Tianlu1,2; Deng, Lu3; Cao, Zhiqiang2; Cheng, Long1,2
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| 刊名 | IEEE ACCESS
 |
| 出版日期 | 2019 |
| 卷号 | 7页码:183070-183080 |
| 关键词 | Nano-scale measurement multi-rate fusion self-sensing TDC |
| ISSN号 | 2169-3536 |
| DOI | 10.1109/ACCESS.2019.2960386 |
| 通讯作者 | Zhou, Chao(chao.zhou@ia.ac.cn) |
| 英文摘要 | Accurate and rapid measuring methods for displacement of nano-scale is necessary for manipulation. Self-sensing and time-digit-conversion(TDC) are two applicable measuring methods especially suitable for room-limited workspaces and vacuum-compliance required applications, thanks to their space-saving advantage and slight thermal impact on system. The self-sensing method gives measurements in high resolution at high sampling rate but its accuracy suffers from nonlinearity, while TDC has better linearity which causes less deviation to results but has a much lower sampling rate. A Kalman filter based fusion approach with dual estimation modes and self-adaptive parameters is designed to fuse the two measurements with different sampling rates at a higher frequency. Modifications to error covariance parameters are applied to traditional Kalman filter so that sensors' generalized errors rather than their Gaussian noises are taken into consideration, and corresponding derivation is given. A series of experiments are conducted to evaluate the performance of the fused measurement. |
| WOS关键词 | CARBON NANOTUBES ; POSITION CONTROL ; ACCELERATION ; SENSORS |
| 资助项目 | National Natural Science Foundation of China[61473295] |
| WOS研究方向 | Computer Science ; Engineering ; Telecommunications |
| 语种 | 英语 |
| WOS记录号 | WOS:000509527200023 |
| 出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 资助机构 | National Natural Science Foundation of China |
| 源URL | [http://ir.ia.ac.cn/handle/173211/29533]  |
| 专题 | 复杂系统管理与控制国家重点实验室_水下机器人 |
| 通讯作者 | Zhou, Chao |
| 作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Inst Automat, Beijing 100190, Peoples R China 3.Cent Univ Finance & Econ, Sch Stat & Math, Beijing 100081, Peoples R China |
| 推荐引用方式 GB/T 7714 | Du, Zhangming,Zhou, Chao,Zhang, Tianlu,et al. A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion[J]. IEEE ACCESS,2019,7:183070-183080. |
| APA | Du, Zhangming,Zhou, Chao,Zhang, Tianlu,Deng, Lu,Cao, Zhiqiang,&Cheng, Long.(2019).A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion.IEEE ACCESS,7,183070-183080. |
| MLA | Du, Zhangming,et al."A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion".IEEE ACCESS 7(2019):183070-183080. |
入库方式： OAI收割
来源：自动化研究所
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