Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication
文献类型：期刊论文
| 作者 | Meng Zhang; Jian Yang; Yurong He; Fan Yang; Yongmei Zhao; Fen Xue; Guowei Han; Chaowei Si; Jin Ning |
| 刊名 | Micromachines
 |
| 出版日期 | 2019 |
| 卷号 | 10页码:420 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29763]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication[J]. Micromachines,2019,10:420. |
| APA | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning.(2019).Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication.Micromachines,10,420. |
| MLA | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning."Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication".Micromachines 10(2019):420. |
入库方式： OAI收割
来源：半导体研究所
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