Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate
文献类型：期刊论文
| 作者 | Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ; Boyu Dong ; Junxi Wang ; Yun Zhang |
| 刊名 | Journal of Physics D: Applied Physics
 |
| 出版日期 | 2019 |
| 卷号 | 52期号:21页码:215103 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29809]  |
| 专题 | 半导体研究所_固态光电信息技术实验室 |
| 推荐引用方式 GB/T 7714 | Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang. Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate[J]. Journal of Physics D: Applied Physics,2019,52(21):215103. |
| APA | Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang.(2019).Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate.Journal of Physics D: Applied Physics,52(21),215103. |
| MLA | Yujie Ai ; Shuai Yang ; Zhe Cheng ; Lian Zhang ; Lifang Jia ;Boyu Dong ; Junxi Wang ; Yun Zhang."Enhanced performance of AlN SAW devices with wave propagation along the 〈11−20〉 direction on c-plane sapphire substrate".Journal of Physics D: Applied Physics 52.21(2019):215103. |
入库方式： OAI收割
来源：半导体研究所
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