中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
In-plane micro-displacement measurement based on secondary diffraction

文献类型:期刊论文

作者Liu, Shengrun1,2; Xue, Bin1; Yu, Jirui1,2; Xu, Guangzhou1; Lv, Juan1; Cheng, Ying1; Yang, Jianfeng1
刊名AIP ADVANCES
出版日期2020-04-01
卷号10期号:4
ISSN号2158-3226
DOI10.1063/1.5143339
产权排序1
英文摘要

For precision machinery, the measurement of the relative in-plane displacement of two parallel planes that are separated by several meters is important. In this paper, a theoretical model for measuring the relative in-plane microdisplacement between two parallel planes was developed on the basis of secondary diffraction. Based on this method, we employed a pinhole and a circular-ring as the diffraction screens. The influence of the structural parameters of diffraction screens on the secondary diffraction pattern was analyzed in detail, and the obtained parameters were then used in the experimental measurements. For experimental investigation, a laser beam at 532 nm was used to irradiate a pinhole; the diffracted light was then further diffracted using a circular-ring, and the final diffraction pattern was recorded using a CCD camera. The circular-ring was mounted on the plane to be measured, while the pinhole and the CCD camera remained stationary; the space between the pinhole and the circular-ring was set at 1200 mm. The displacement of the circular-ring can be calculated by comparing the central position of the two diffraction patterns before and after shifting the circular-ring. Over a measurement range of 0-90 mu m, the absolute error in the displacement measurement was less than 1.97 mu m.

语种英语
WOS记录号WOS:000525096100003
出版者AMER INST PHYSICS
源URL[http://ir.opt.ac.cn/handle/181661/93373]  
专题西安光学精密机械研究所_月球与深空探测技术研究室
通讯作者Yang, Jianfeng
作者单位1.Xi'an Institute of Optics and Precision Mechanics of Chinese Academy of Sciences, Xi'an, Shaanxi, China;
2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
Liu, Shengrun,Xue, Bin,Yu, Jirui,et al. In-plane micro-displacement measurement based on secondary diffraction[J]. AIP ADVANCES,2020,10(4).
APA Liu, Shengrun.,Xue, Bin.,Yu, Jirui.,Xu, Guangzhou.,Lv, Juan.,...&Yang, Jianfeng.(2020).In-plane micro-displacement measurement based on secondary diffraction.AIP ADVANCES,10(4).
MLA Liu, Shengrun,et al."In-plane micro-displacement measurement based on secondary diffraction".AIP ADVANCES 10.4(2020).

入库方式: OAI收割

来源:西安光学精密机械研究所

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