Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors
文献类型：期刊论文
| 作者 | Tong,Weiguang1,2; Wang,Ying3; Bian,Yuzhi2; Wang,Anqi2; Han,Ning2,4; Chen,Yunfa2,4 |
| 刊名 | Nanoscale Research Letters
 |
| 出版日期 | 2020-02-05 |
| 卷号 | 15期号:1 |
| 关键词 | Cross-linked SnO2:NiO network Self-assembly Gas sensor MEMS compatible Ethanol detection |
| ISSN号 | 1931-7573 |
| DOI | 10.1186/s11671-020-3269-3 |
| 英文摘要 | AbstractNowadays, it is still technologically challenging to prepare highly sensitive sensing films using microelectrical mechanical system (MEMS) compatible methods for miniaturized sensors with low power consumption and high yield. Here, sensitive cross-linked SnO2:NiO networks were successfully fabricated by sputtering SnO2:NiO target onto the etched self-assembled triangle polystyrene (PS) microsphere arrays and then ultrasonically removing the PS microsphere templates in acetone. The optimum line width (~?600?nm) and film thickness (~?50?nm) of SnO2:NiO networks were obtained by varying the plasma etching time and the sputtering time. Then, thermal annealing at 500?°C in H2 was implemented to activate and reorganize the as-deposited amorphous SnO2:NiO thin films. Compared with continuous SnO2:NiO thin film counterparts, these cross-linked films show the highest response of ~?9 to 50?ppm ethanol, low detection limits ( |
| 语种 | 英语 |
| WOS记录号 | BMC:10.1186/S11671-020-3269-3 |
| 出版者 | Springer US |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/38264]  |
| 专题 | 中国科学院过程工程研究所 |
| 通讯作者 | Wang,Ying; Han,Ning |
| 作者单位 | 1. 2. 3. 4. |
| 推荐引用方式 GB/T 7714 | Tong,Weiguang,Wang,Ying,Bian,Yuzhi,et al. Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors[J]. Nanoscale Research Letters,2020,15(1). |
| APA | Tong,Weiguang,Wang,Ying,Bian,Yuzhi,Wang,Anqi,Han,Ning,&Chen,Yunfa.(2020).Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors.Nanoscale Research Letters,15(1). |
| MLA | Tong,Weiguang,et al."Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors".Nanoscale Research Letters 15.1(2020). |
入库方式： OAI收割
来源：过程工程研究所
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