Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors
文献类型：期刊论文
| 作者 | Wang, Y.2; Tong, W. G.1; Han, N.1 |
| 刊名 | MATERIALS LETTERS
 |
| 出版日期 | 2020-08-15 |
| 卷号 | 273页码:4 |
| 关键词 | Pd/SnO2 NiO thin films Composite materials Sputtering Ethanol gas detection XPS MEMS gas sensor |
| ISSN号 | 0167-577X |
| DOI | 10.1016/j.matlet.2020.127924 |
| 英文摘要 | Here, we disclose the Pd-doped SnO2:NiO sensing films integrated on the microheaters by a facile co-sputtering method. The Pd content is controlled by the sputtering power, and thermal annealing at 500 degrees C in H-2 is implemented to activate the hybrid Pd/SnO2:NiO film. The 20 nm-thick Pd/SnO2:NiO films with Pd sputtering power of 20 W exhibits significantly enhanced ethanol sensing performance, with the response of 12 to 50 ppm ethanol, low detection limit of <5 ppm, high selectivity, good stability and low device-to-device variation of <15%. The gas sensing property enhancement can be predominantly attributed to the Schottky barrier at Pd-SnO2 interface and the Pd-induced catalytic oxidation of ethanol. These results enable the fabrication of wafer-scale micro ethanol gas sensors with low energy dissipation using the entire Micro-Electrical-Mechanical System (MEMS) strategy. (C) 2020 Elsevier B.V. All rights reserved. |
| 资助项目 | National Natural Science Foundation of China[51602314] |
| WOS研究方向 | Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000538775600028 |
| 出版者 | ELSEVIER |
| 资助机构 | National Natural Science Foundation of China |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/41109]  |
| 专题 | 中国科学院过程工程研究所 |
| 通讯作者 | Wang, Y.; Han, N. |
| 作者单位 | 1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Beijing Jiaotong Univ, Sch Sci, Dept Phys, Beijing 100044, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wang, Y.,Tong, W. G.,Han, N.. Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors[J]. MATERIALS LETTERS,2020,273:4. |
| APA | Wang, Y.,Tong, W. G.,&Han, N..(2020).Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors.MATERIALS LETTERS,273,4. |
| MLA | Wang, Y.,et al."Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors".MATERIALS LETTERS 273(2020):4. |
入库方式： OAI收割
来源：过程工程研究所
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