Additive manufacturing of millimeter-scale micron-accuracy 3D structures
文献类型：会议论文
| 作者 | Yang, Hua2,3; Zhao, Yuan-Yuan1; Jin, Feng2; Liu, Jie2; Dong, Xian-Zi2; Zheng, Mei-Ling2; Duan, Xuan-Ming1; Zhao, Zhen-Sheng2 |
| 出版日期 | 2019 |
| 会议日期 | June 26, 2018 - June 29, 2018 |
| 会议地点 | Chengdu, China |
| DOI | 10.1117/12.2506103 |
| 英文摘要 | In this work, we demonstrate a developed 3D printing based on two-photon polymerization for achieving millimeter-scale, micron-accuracy 3D structures (MM-3DS), which combines the femtosecond laser of 800 nm and low magnification objective lens of 10×. The commercial photoresist SU-8 is used in 3D printing system for improving mechanical strength and chemical stability of MM-3DS. The 3D microstructures are preprogrammed and optimized by considering the scanning mode and experiment parameters. During 3D printing process, micron features are written within the interior of SU-8 film via localized polymerization driven by nonlinear two-photon absorption process. By the 3D movement in ∼1 mm scale of the focused beam, a customized MM-3DS can be produced. We have fabricated a customized MM-3DS with a size of 1.6 mm and an accuracy of 10 μm. The influence of volume for the printing structures Vs on the printing time T exhibits a linear behavior, indicating that the printing speed is 0.248 mm3/h under the current conditions. This technology offers a flexible and low-cost method of generating highly customizable, precisely controlled MM-3DS, which is promising for the manufacture of complex functional structures and devices for the microfluidics, microelectronics, photonics and so on. © 2019 SPIE. |
| 会议录 | 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-Limited Plasmonic Lithography and Innovative Manufacturing Technology, AOMATT 2018
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| 语种 | 英语 |
| 电子版国际标准刊号 | 1996756X |
| ISSN号 | 0277786X |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/9793]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 作者单位 | 1.Chongqing Key Laboratory of Additive Manufacturing Technology and Systems, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, No.266 Fangzheng Ave, Shuitu Hi-tech Industrial Park, Beibei District, Chongqing; 400714, China; 2.Laboratory of Organic NanoPhotonics, CAS Key Laboratory of Bio-Inspired Materials and Interfacial Science, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, No.29 Zhongguancun East Road, Beijing; 100190, China; 3.School of Future Technologies, University of Chinese Academy of Sciences, Yanqihu Campus, Huaibei Town, Huaibei Zhang, Huairou District, Beijing; 101407, China |
| 推荐引用方式 GB/T 7714 | Yang, Hua,Zhao, Yuan-Yuan,Jin, Feng,et al. Additive manufacturing of millimeter-scale micron-accuracy 3D structures[C]. 见:. Chengdu, China. June 26, 2018 - June 29, 2018. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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