Polishing method for polyimide membranes based on reactive ion etching
文献类型：期刊论文
| 作者 | Yang, Zheng1,2 ; Jin, Zhi-Wei1,2; Chen, Jian-Jun1,2; Rao, Xian-Hua1,2; Yin, Shao-Yun1,2; Wu, Peng1,2
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| 刊名 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering
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| 出版日期 | 2019 |
| 卷号 | 27期号:2页码:302-308 |
| ISSN号 | 1004924X |
| DOI | 10.3788/OPE.20192702.0302 |
| 英文摘要 | To improve the surface quality of polyimide (PI) optics, a polishing method for polyimide membranes based on Reactive Ion Etching (RIE) was proposed. The working principle and experimental research for the proposed method were discussed in this study. Owing to the low surface tension and mobility of the PR fluid, surface defects on the PI surface were required to be filled by a PR coating. In addition, owing to the highly anisotropic and identical RIE rates for PR and PI, the smooth PR surface could be precisely transferred onto the PI surface. The polishing of PI membranes then was realized. Experimental results indicate that for a surface roughness with PV of 1.347 μm and RMS of 340 nm, the respective values can be reduced to 75 nm and 13 nm after double polishing. Furthermore, for a surface roughness with PV of 61 nm and RMS of 8 nm, the values can be reduced to 9 nm and 1 nm, respectively. Hence, the proposed polishing method based on RIE can efficiently improve the surface finish of PI membranes, which in turn can provide novel schemes for precision manufacturing of PI-based flexible polymer devices. © 2019, Science Press. All right reserved. |
| 语种 | 中文 |
| 源URL | [http://119.78.100.138/handle/2HOD01W0/9837]  |
| 专题 | 中国科学院重庆绿色智能技术研究院 |
| 作者单位 | 1.Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing; 400714, China; 2.Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing; 400714, China |
| 推荐引用方式 GB/T 7714 | Yang, Zheng,Jin, Zhi-Wei,Chen, Jian-Jun,et al. Polishing method for polyimide membranes based on reactive ion etching[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2019,27(2):302-308. |
| APA | Yang, Zheng,Jin, Zhi-Wei,Chen, Jian-Jun,Rao, Xian-Hua,Yin, Shao-Yun,&Wu, Peng.(2019).Polishing method for polyimide membranes based on reactive ion etching.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,27(2),302-308. |
| MLA | Yang, Zheng,et al."Polishing method for polyimide membranes based on reactive ion etching".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 27.2(2019):302-308. |
入库方式： OAI收割
来源：重庆绿色智能技术研究院
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